ICMENS 2003: Banff, Alberta, Canada

2003 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2003), 20-23 July 2003, Banff, Alberta, Canada. IEEE Computer Society 2003, ISBN 0-7695-1947-4

Session M1

Yoseph Bar-Cohen:
Biologically Inspired Intelligent Robots Using Artificial Muscles. 2-

Session M1A

Linke Jian, Bernd Loechel, Heinz-Ulrich Scheunemann, Martin Bednarzik, Yohannes M. Desta, Jost Goettert:
Fabrication of Ultra Thick, Ultra High Aspect Ratio Microcomponents by Deep and Ultra Deep X-Ray Lithography. 10-14
M. Y. Serry, D. W. Raboud, Walied A. Moussa:
Finite-Element Modeling of Shape Memory Alloy Components in Smart Structures, Part I: Non-Linear Coupled Field Finite Element Procedure. 15-
Yoseph Bar-Cohen, Stewart Sherrit, Xiaoqi Bao, Zensheu Chang:
Ultrasonic/Sonic Sampler and Sensor Platform for In-Situ Planetary Exploration. 22-21
Rashad Sharaf, Priyanka Aggarwal, Karan V. I. S. Kaler, Wael M. Badawy:
On The Design of an Electronic Mosquito: Design and Analysis of the Micro-Needle. 32-

Session M1B

Anton A. Kachayev, David M. Klymyshyn, Sven Achenbach, Volker Saile:
High Vertical Aspect Ratio Liga Microwave 3-DB Coupler. 38-43
C. Germain, Ying Y. Tsui:
Femtosecond Laser Induced Forward Transfer of Materials. 44-47
Sean E. Kirkwood, Mohammad R. Shadnam, Robert Fedosejevs, Alidad Amirfazi:
Direct Writing of Self-Assembled Monolayers on Gold Coated Substrates Using a CW Argon Laser. 48-52
Robert Fedosejevs, Michael A. Argument, Arzu Sardarli, Sean E. Kirkwood, Robert Holenstein, Ying Y. Tsui:
Laser Micromachining for Microfluidic, Microelectronic and MEMS Applications. 53-

Session M2A

Jack A. Tuszynski, E. J. Carpenter, E. Crawford, J. A. Brown, W. Malinski, J. M. Dixon:
Molecular Dynamics Calculations of the Electrostatic Properties of Tubulin and Their Consequences for Microtubules. 56-61
Hesham Ahmed, Walied A. Moussa:
Optimizing the Performance of Electrostatic Comb-Drive Actuators Using Neural Networks. 62-68
Angela Antoniu, Mark Salomons, Nicolae Reus:
Effects of Electrostatic Charge Accumulation During MEMS Fabrication. 69-75
John A. Pelesko, G. Goldsztein:
Electrostatic Deflections of Volume Constrained MEMS. 76-

Session M2B

Raimar Löbenberg:
Smart Materials: Applications of Nanotechnology in Drug Delivery and Drug Targeting. 82-83
R. Mohammadi, Warren H. Finlay, Wilson H.-Y. Roa, A. Amirfazli:
Determination of Contact Angle of Microspheres by Microscopy Methods. 84-88
A. H. M. Habib Ahsan, Carlos F. Lange, Walied A. Moussa:
Development of a Humidity Microsensor with Thermal Reset. 89-93
Ali Dolatabadi, Javad Mosatghimi, Valerian Pershin:
A New Design for Coating Thin Film Alumina on Stainless Steel for Biomedical Applications. 94-

Session M3A

Kee-Keun Lee, Bruce C. Kim:
RF MEMS Switch for Wireless LAN Applications. 100-102
R. R. Mansour, M. Bakri-Kassem, Mahmoud Daneshmand, N. Messiha:
RF MEMS Device. 103-107
Daniel C. Asmar, Medhat Moussa, John S. Zelek:
On the Role of Machine Learning Algorithms in Developing MEMS Components. 108-113
Imed Zine-El-Abidine, Michal M. Okoniewski, John G. McRory:
A New Class of Tunable RF MEMS Inductor. 114-

Session M3B

Stephen C. Jakeway, H. John Crabtree, Teodor Veres, Neil S. Cameron, Helge Luesebrink, Thomas Glinsner:
Transition of MEMS Technology to Nanofabrication. 118-122
Keith E. Ritala, Eric Miller:
Success Factors in Commercializing University MEMS Technology through the WTC?s Microfabrication Laboratory. 123-127
Xiaoyang Zhu:
Monolayer Surface Coatings Solve Stiction and Drift Problems in MEMS. 128-130
Jim Aberson, Pierre Cusin, James Wylde, Ryan Hickey, Heiko Fetti:
Novel Backend Singulation Techniques to Enable Commercialization of Optical MEMS. 131-

Session T1

Hybrid Nanostructures, Hiro Akinaga:
High-Sensitive Magnetic-Field-Sensing Materials Composed of Metal/Semiconductor. 134-

Session T1A

T. Manago:
Spin Detection and Injection Using Ferromagnetic Metal and Semiconductor Hybrid Structure. 142-147
Scott E. Irvine, Abdulhakem Y. Elezzabi:
Parametric Excitation of Spin Waves in Bismuth-Substituted Yttrium Iron Garnet Films Using the First-Order Suhl Instability. 148-152
Caigen Liu, Clarence E. Capjack, Wojciech Rozmus, K. Singh, Christopher J. Backhouse:
Numerical Study of Effects of Cellular Nanostructure on Scattered Light. 153-158
Arzu Sardarli, Igor M. Filanovsky, R. M. Sardarli, O. A. Samedov, I. Sh. Sadigov, A. I. Aslanov:
Relaxor Properties of TlInS2 Composites with Nanodomain State. 159-

Session T1B

R. Arief Budiman, Alf Gerisch, Anna T. Lawniczak, Harry E. Ruda, Henryk Fuks:
Lattice Gas Automata Simulation of Atomistic Surface Growth. 164
S. R. Kennedy, M. O. Jensen, Michael J. Brett:
Three-Dimensional Square Spiral Photonic Crystal Nanostructures by Glancing Angle Deposition. 165-171
Robert M. Bryce, Raymond G. DeCorby, James N. McMullin, Ying Y. Tsui:
Direct Production of Gratings on Polymers Using UV Laser Radiation. 172-176
Martin Bednarzik, Heinz-Ulrich Scheunemann, Alexander Barth, Daniel Schondelmaier, Bernd Loechel:
First Results in Patterning of Ultra High Aspect Ratio Microstructures by a 4T Wave Length Shifter at BESSY. 177-

Session T2A

Gilberto Flores, Gema A. Mercado, John A. Pelesko:
Dynamics and Touchdown in Electrostatic MEMS. 182-187
Eihab M. Abdel-Rahman, Ali H. Nayfeh, Mohammad I. Younis:
Dynamics of an Electrically Actuated Resonant Microsensor. 188-196
Neil Fortner, Benjamin Shapiro:
Equilibrium and Dynamic Behavior of Micro Flows Under Electrically Induced Surface Tension Actuation Force. 197-202
Kousik Sivakumar, Balaji Panchapakesan:
Electric Field Assisted Deposition of Nanowires from Carbon Nanotubes for Nanoelectronics and Sensor Applications. 203-

Session T2B

Kee-Keun Lee, Bruce C. Kim:
MEMS Spring Probe for Next Generation Wafer Level Testing. 214-217
Arzu Sardarli, Igor M. Filanovsky, R. M. Sardarli, O. A. Samedov, I. Sh. Sadigov, A. I. Aslanov:
Translation of the Phase Transition Temperature in TlInS2 Crystals with Cationic Impurity Doping. 218-221
Tiansheng Zhou, Pat Wright, Jared Crawford, Graham Mckinnon, Yunfa Zhang:
MEMS 3D Optical Mirror/Scanner. 222-226
Farid Boussaïd, Amine Bermak, Abdesselam Bouzerdoum:
Programmable Multi-Task On-Chip Processing for CMOS Imagers. 227-

Session T3

Mark Johnson:
Spintronics, and Electrical Spin Injection in a Two Dimensional Electron Gas. 234-

Session T3A

John Samuel, Manish Diwan, Praveen Elamanchili, Carrie Chong, M. E. Christine Lutsiak, Kimberley D. Newman, Glen S. Kwon:
Polymeric Nanoparticles for Targeted Delivery of Therapeutic Vaccines to Dendritic Cells. 242-246
Peiyu Zhang, Graham A. Jullien:
Micromachined Needles for Microbiological Sample and Drug Delivery System. 247-250
Nathalie Picollet-D'hahan, Fabien Sauter, Florence Ricoul, Catherine Pudda, Frédérique Marcel, Thomas Sordel, François Chatelain, Isabelle Chartier:
Multi-Patch : A Chip-Based Ion-Channel Assay System for Drug Screening. 251-255
Yehya H. Ghallab, Wael M. Badawy, Karan V. I. S. Kaler:
A Novel PH Sensor Using Differential ISFET Current Mode Read-Out Circuit. 255-

Session T3B

Menachem Elimelech:
Particle Deposition onto Solid Surfaces with Microscopic Charge Heterogeneity: The "Bump Effect". 260
Jacob Masliyah, Zhenghe Xu:
Understanding Bitumen Recovery from Oil Sands through Colloidal and Interfacial Phenomena. 261
Seoktae Kang, Gaurav Agarwal, Eric M. V. Hoek, Marc A. Deshusses:
Initial Adhesion of Microorganisms to Polymeric Membranes. 262
Prodip K. Das, Subir Bhattacharjee:
Electrostatic Interactions between Nanoparticles in Confined Spaces: Influence of Confining Wall Roughness. 263-

Session T4B

R. Arief Budiman:
Energetics and Strain Field of Surface Steps. 270-273
Tralvex Yeap, Gim Hwa Loo, Serena Pang:
Computational Patent Mapping: Intelligent Agents for Nanotechnology. 274-278
K. Sadek, Walied A. Moussa:
Application of Adaptive Multilevel Substructuring Technique to Model CMOS Micromachined Thermistor Gas Sensor, Part (I): A Feasibility Study. 279-284
Erik Novak, Der-Shen Wan, Paul Unruh, Joanna Schmit:
Dynamic MEMS Measurement Using a Strobed Interferometric System with Combined Coherence Sensing and Phase Information. 285-

Session W1

Henry Baltes:
Micro and Nano Sensors Snoop Around. 290-

Session W1A

Desheng Li, Yufeng Zhang:
Finite Element Simulation and Theoretical Analysis of Microelectromechanical System Relays. 292-296
Sazzadur Chowdhury, Majid Ahmadi, William C. Miller:
Nonlinear Effects in MEMS Capacitive Microphone Design. 297-302
George Q. Jiang, Ed R. Borzabadi, Harbert Barki:
Preliminary Analysis of Magnetic Shielding Design. 303-307
Evgueni V. Bordatchev, S. K. Nikumb:
Microgripper: Design, Finite Element Analysis and Laser Microfabrication. 308-

Session W1B

Taro Nagahama, Shinji Yuasa, Yoshishige Suzuki:
Quantum Size Effect in Magnetic Tunnel Junctions with Single-Crystal Ultrathin Electrodes. 316-320
Bruce F. Cockburn:
The Emergence of High-Density Semiconductor-Compatible Spintronic Memory. 321-326
Peter C. P. Hrudey, Michael T. Taschuk, Ying Y. Tsui, Robert Fedosejevs, Jeremy C. Sit, Michael J. Brett:
Evaporated Nanostructured Y2O3: Eu Thin Films. 327-331
Mir Behrad Khamesee, Norihiko Kato, Yoshihiko Nomura, Tatsuya Nakamur:
Performance Improvement of a Magnetically Levitated Microrobot Using an Adaptive Control. 332-

Session W2A

Gordon M. Turner, Matthew C. Beard, Charles A. Schmuttenmaer:
Conductivity in CdSe Quantum Dots and TiO2 Nanoparticles: What Can THz Spectroscopy Tell Us? 340-345
Kazuhiro Murata:
Super-Fine Ink-Jet Printing for Nanotechnology. 346-349
A. D. F. Dunbar, J. G. Partridge, M. Schulze, S. Scott, S. A. Brown:
Measurement of the Conductivity Exponent in Random Percolating Networks of Nanoscale Bismuth Clusters. 350-356
Farid Boussaïd, Douglas Chai, Abdesselam Bouzerdoum:
On-Chip Skin Detection for Color CMOS Imagers. 357-

Session W2B

Gholamreza Karimi, J. Richard Culham:
Transient Electro-Oosmotic Pumping in Rectangular Microchannels. 364-372
K. Singh, Caigen Liu, Clarence E. Capjack, Wojciech Rozmus, Christopher J. Backhouse:
A Microfluidic Device with On-Chip Optical Waveguide Interrogation of Individual Biological Cells for Medical Diagnostics. 373-376
Christopher J. Backhouse, T. Footz, Sophia Adamia, Linda M. Pilarski:
Microfluidic Chips for the Molecular Analysis of Human Cancer. 377-382
Keisuke Murat, Hajime Kubota:
A Proposal for the Multivalued Modulation System Based on the Projection to Subspace. 383-

Session W3A

K. Sadek, Walied A. Moussa:
Application of Adaptive Multilevel Substructuring Technique to Model CMOS Micromachined Thermistor Gas Sensor, Part (II): Effect of Manufacturing Uncertainties in the Reliability of MEMS. 390-395
Jian-Bin Bao, D. Jed Harrison:
Design and Fabrication of Microchannels for Magnetohydrodynamic Flow. 396-399
Bowei Zhang, Mojtaba Kahrizi:
High-Temperature Bragg Grating Waveguide Sensor. 400-404
Bradley J. Kirchmayer, Walied A. Moussa, M. David Checkel:
Finite Element Modeling of a Capacitive Micromachined Ultrasonic Transducer. 405-

Session W3B

C. Y. Wang, C. Q. Ru, A. Mioduchowski:
Pressure-Induced Polygonization of Filled Multiwall Carbon Nanotube. 412-417
Kee-Keun Lee, Jiping He, Amarjit Singh, Bruce C. Kim:
Benzocyclobutene (BCB) Based Intracortical Neural Implant. 418-422
M. Y. Serry, Walied A. Moussa, D. W. Raboud:
Finite-Element Modeling of Shape Memory Alloy Components in Smart Structures, Part II: Application on Shape-Memory-Alloy - Embedded Smart Composite for Self-Damage Control. 423-429
J. Yoon, C. Q. Ru, A. Mioduchowski:
Terahertz Wave Propagation in Multiwall Carbon Nanotubes. 430-

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