A. Acovic

	2002
1		O. Jeandupeux, V. Marsico, A. Acovic, P. Fazan, H. Brune, K. Kern: Use of scanning capacitance microscopy for controlling wafer processing. Microelectronics Reliability 42(2): 225-231 (2002)

Coauthor Index

1	H. Brune	[1]
2	P. Fazan	[1]
3	O. Jeandupeux	[1]
4	K. Kern	[1]
5	V. Marsico	[1]