T. Akashi

List of publications from the DBLP Bibliography Server - FAQ

Ask others: ACM DL/Guide -

2008

1 T. Akashi, Y. Yoshimura: Profile Control of a Borosilicate-Glass Groove Formed by Deep Reactive Ion Etching CoRR abs/0802.3085: (2008)

	2008
1		T. Akashi, Y. Yoshimura: Profile Control of a Borosilicate-Glass Groove Formed by Deep Reactive Ion Etching CoRR abs/0802.3085: (2008)

Coauthor Index