- CSB - MetaPress - Google - Bing - Yahoo
 | 2003 | |
|---|---|---|
| 1 |      | Thomas Gessner, Andreas Bertz, Christian Lohmann, Steffen Kurth, Karla Hiller: Advanced Silicon Micromachining. International Journal of Computational Engineering Science 4(2): 151 (2003) |
| 1 | Thomas Gessner | [1] |
| 2 | Karla Hiller | [1] |
| 3 | Steffen Kurth | [1] |
| 4 | Christian Lohmann | [1] |