P. A. Crossley

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1988

1 H. Keith Nishihara, P. A. Crossley: Measuring Photolithographic Overlay Accuracy and Critical Dimensions by Correlating Binarized Laplacian of Gaussian Convolutions. IEEE Trans. Pattern Anal. Mach. Intell. 10(1): 17-30 (1988)

	1988
1		H. Keith Nishihara, P. A. Crossley: Measuring Photolithographic Overlay Accuracy and Critical Dimensions by Correlating Binarized Laplacian of Gaussian Convolutions. IEEE Trans. Pattern Anal. Mach. Intell. 10(1): 17-30 (1988)

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