S. Degendt

	2005
1		S. Beckx, M. Demand, S. Locorotondo, K. Henson, M. Claes, V. Paraschiv, D. Shamiryan, P. Jaenen, W. Boullart, S. Degendt: Implementation of high-k and metal gate materials for the 45nm node and beyond: gate patterning development. Microelectronics Reliability 45(5-6): 1007-1011 (2005)

Coauthor Index

1	S. Beckx	[1]
2	W. Boullart	[1]
3	M. Claes	[1]
4	M. Demand	[1]
5	K. Henson	[1]
6	P. Jaenen	[1]
7	S. Locorotondo	[1]
8	V. Paraschiv	[1]
9	D. Shamiryan	[1]