| 2004 | ||
|---|---|---|
| 2 | Takashi Yoda, Hirokazu Ezawa, Kaori Tsutsumi, Makoto Honda: The sprint process of Al interconnects with low-temperature PVD via filling. IEICE Electronic Express 1(9): 263-268 (2004) | |
| 2003 | ||
| 1 | Hirokazu Ezawa, Masaharu Seto, Masahiro Miyata, Hiroshi Tazawa: Polymer film deposition with fine pitch openings by stencil printing. Microelectronics Reliability 43(3): 473-479 (2003) | |
| 1 | Makoto Honda | [2] |
| 2 | Masahiro Miyata | [1] |
| 3 | Masaharu Seto | [1] |
| 4 | Hiroshi Tazawa | [1] |
| 5 | Kaori Tsutsumi | [2] |
| 6 | Takashi Yoda | [2] |