Nikos Glezos

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1996

1 Nikos Glezos, Ioannis Raptis: A fast electron beam lithography simulator based on the Boltzmann transport equation. IEEE Trans. on CAD of Integrated Circuits and Systems 15(1): 92-102 (1996)

	1996
1		Nikos Glezos, Ioannis Raptis: A fast electron beam lithography simulator based on the Boltzmann transport equation. IEEE Trans. on CAD of Integrated Circuits and Systems 15(1): 92-102 (1996)

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