Mark C. Hakey

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1997

1 Steven J. Holmes, Peter H. Mitchell, Mark C. Hakey: Manufacturing with DUV lithography. IBM Journal of Research and Development 41(1&2): 7-20 (1997)

	1997
1		Steven J. Holmes, Peter H. Mitchell, Mark C. Hakey: Manufacturing with DUV lithography. IBM Journal of Research and Development 41(1&2): 7-20 (1997)

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