H. R. Koenig

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2000

1 H. R. Koenig, Leon I. Maissel: Application of rf discharges to sputtering. IBM Journal of Research and Development 44(1): 106-111 (2000)

	2000
1		H. R. Koenig, Leon I. Maissel: Application of rf discharges to sputtering. IBM Journal of Research and Development 44(1): 106-111 (2000)

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