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 | 2008 | |
|---|---|---|
| 1 |      | Kiah Mok Goh, Benny Tjahjono, Abdul Manaf, Anton J. R. Aendenroomer: An IEC 61499 based run-to-run controller for chemical mechanical planarization process. ETFA 2008: 25-28 |
| 1 | Anton J. R. Aendenroomer | [1] |
| 2 | Kiah Mok Goh | [1] |
| 3 | Benny Tjahjono | [1] |