Paul R. McHugh

	2005
1		Thomas L. Ritzdorf, Gregory J. Wilson, Paul R. McHugh, Daniel J. Woodruff, Kyle M. Hanson, Dakin Fulton: Design and modeling of equipment used in electrochemical processes for microelectronics. IBM Journal of Research and Development 49(1): 65-78 (2005)

Coauthor Index

1	Dakin Fulton	[1]
2	Kyle M. Hanson	[1]
3	Thomas L. Ritzdorf	[1]
4	Gregory J. Wilson	[1]
5	Daniel J. Woodruff	[1]