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DBLP keys2001
2Electronic Edition pubzone.org CiteSeerX Google scholar BibTeX bibliographical record in XMLA. Keith Bates, Mordechai Rothschild, Theodore M. Bloomstein, Theodore H. Fedynyshyn, Roderick R. Kunz, Vladimir Liberman, Michael Switkes: Review of technology for 157-nm lithography. IBM Journal of Research and Development 45(5): 605-614 (2001)
1997
1Electronic Edition pubzone.org CiteSeerX Google scholar BibTeX bibliographical record in XMLMordechai Rothschild, Anthony R. Forte, Roderick R. Kunz, Susan C. Palmateer, Janusz H. C. Sedlacek: Lithography at a wavelength of 193 nm. IBM Journal of Research and Development 41(1&2): 49-56 (1997)

Coauthor Index

1A. Keith Bates [2]
2Theodore M. Bloomstein [2]
3Theodore H. Fedynyshyn [2]
4Anthony R. Forte [1]
5Roderick R. Kunz [1] [2]
6Vladimir Liberman [2]
7Susan C. Palmateer [1]
8Janusz H. C. Sedlacek [1]
9Michael Switkes [2]

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