 | 2003 |
|---|
| 3 |       | Tietun Sun,
Jianmin Miao,
Hong Zhu,
Ciprian Iliescu,
Jianbo Sun:
Study On Feature Of Silicon Microtrenches With A Multiplexed Inductively Coupled Plasma Etcher.
International Journal of Computational Engineering Science 4(2): 319-322 (2003) |
| 2 | | Jianbo Sun,
Jianmin Miao,
Tietun Sun,
Hong Zhu:
Development And Comparison Of Micromachined Inductors For Rf Applications.
International Journal of Computational Engineering Science 4(2): 363-367 (2003) |
| 1 | | Ciprian Iliescu,
Tietun Sun,
Jianmin Miao,
Francis Eng Hock Tay:
Fabrication Process Of A Capacitive Microphone With p++ Diaphragm And Silicon Bonded Top-Plate.
International Journal of Computational Engineering Science 4(3): 687-690 (2003) |
