P. Szabo

	2007
1		P. Szabo, B. Nemeth, Márta Rencz, Bernard Courtois: Characterisation of the Etching Quality in Micro-Electro-Mechanical Systems by Thermal Transient Methodology CoRR abs/0711.3301: (2007)

Coauthor Index

1	Bernard Courtois	[1]
2	B. Nemeth	[1]
3	Márta Rencz	[1]