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 | 2003 | |
|---|---|---|
| 1 |      | Hirokazu Ezawa, Masaharu Seto, Masahiro Miyata, Hiroshi Tazawa: Polymer film deposition with fine pitch openings by stencil printing. Microelectronics Reliability 43(3): 473-479 (2003) |
| 1 | Hirokazu Ezawa | [1] |
| 2 | Masahiro Miyata | [1] |
| 3 | Masaharu Seto | [1] |