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 | 2005 | |
|---|---|---|
| 1 |      | Phillipe M. Vereecken, Robert A. Binstead, Hariklia Deligianni, Panayotis C. Andricacos: The chemistry of additives in damascene copper plating. IBM Journal of Research and Development 49(1): 3-18 (2005) |
| 1 | Panayotis C. Andricacos | [1] |
| 2 | Robert A. Binstead | [1] |
| 3 | Hariklia Deligianni | [1] |