Wataru Wakamiya

	2005
1		Takashi Nasuno, Yoshihisa Matsubara, Hiromasa Kobayashi, Akiyuki Minami, Eiichi Soda, Hiroshi Tsuda, Koichiro Tsujita, Wataru Wakamiya, Nobuyoshi Kobayashi: Novel via Chain Structure for Failure Analysis at 65 nm-Node Fixing OPC Using Inner and Outer via Chain Dummy Patterns. IEICE Transactions 88-C(5): 796-803 (2005)

Coauthor Index

1	Hiromasa Kobayashi	[1]
2	Nobuyoshi Kobayashi	[1]
3	Yoshihisa Matsubara	[1]
4	Akiyuki Minami	[1]
5	Takashi Nasuno	[1]
6	Eiichi Soda	[1]
7	Hiroshi Tsuda	[1]
8	Koichiro Tsujita	[1]