| 2001 | ||
|---|---|---|
| 2 | William D. Hinsberg, Frances A. Houle, Martha I. Sanchez, Gregory M. Wallraff: Chemical and physical aspects of the post-exposure baking process used for positive-tone chemically amplified resists. IBM Journal of Research and Development 45(5): 667-682 (2001) | |
| 1997 | ||
| 1 | Robert D. Allen, Gregory M. Wallraff, Donald C. Hofer, Roderick R. Kunz: Photoresists for 193-nm lithography. IBM Journal of Research and Development 41(1&2): 95-104 (1997) | |
| 1 | Robert D. Allen | [1] |
| 2 | William D. Hinsberg | [2] |
| 3 | Donald C. Hofer | [1] |
| 4 | Frances A. Houle | [2] |
| 5 | Roderick R. Kunz | [1] |
| 6 | Martha I. Sanchez | [2] |