Alan C. West

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2005

1 Alan C. West, Hariklia Deligianni, Panayotis C. Andricacos: Electrochemical planarization of interconnect metallization. IBM Journal of Research and Development 49(1): 37-48 (2005)

	2005
1		Alan C. West, Hariklia Deligianni, Panayotis C. Andricacos: Electrochemical planarization of interconnect metallization. IBM Journal of Research and Development 49(1): 37-48 (2005)

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