Timothy J. Wiltshire

	1997
2		Christopher P. Ausschnitt, Allan C. Thomas, Timothy J. Wiltshire: Advanced DUV photolithography in a pilot lineenvironment. IBM Journal of Research and Development 41(1&2): 21-38 (1997)
	1992
1		Robert M. Booth Jr., Kurt A. Tallman, Timothy J. Wiltshire, Pui L. Yee: A statistical approach to quality control of non-normal lithographical overlay distributions. IBM Journal of Research and Development 36(5): 835-844 (1992)

Coauthor Index

1	Christopher P. Ausschnitt	[2]
2	Robert M. Booth Jr.	[1]
3	Kurt A. Tallman	[1]
4	Allan C. Thomas	[2]
5	Pui L. Yee	[1]

Colors in the list of coauthors