Chuan Jie Zhong

	2006
1		Chuan Jie Zhong, Hiroaki Tanaka, Shigetoshi Sugawa, Tadahiro Ohmi: High quality silicon nitride deposited by Ar/N2/H2/SiH4 high-density and low energy plasma at low temperature. Microelectronics Journal 37(1): 44-49 (2006)

Coauthor Index

1	Tadahiro Ohmi	[1]
2	Shigetoshi Sugawa	[1]
3	Hiroaki Tanaka	[1]