Zai-Fa Zhou

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2007

1 Zai-Fa Zhou, Qing-An Huang, Wei-Hua Li, Wei Lu: A Novel 3-D Dynamic Cellular Automata Model for Photoresist-Etching Process Simulation. IEEE Trans. on CAD of Integrated Circuits and Systems 26(1): 100-114 (2007)

	2007
1		Zai-Fa Zhou, Qing-An Huang, Wei-Hua Li, Wei Lu: A Novel 3-D Dynamic Cellular Automata Model for Photoresist-Etching Process Simulation. IEEE Trans. on CAD of Integrated Circuits and Systems 26(1): 100-114 (2007)

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