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 | 2003 | |
|---|---|---|
| 1 |      | Hong Zhu, Jianmin Miao, Bangtao Chen, Zhihong Wang, Weiguan Zhu: Micromachining Process Of Piezoelectric Microcantilever Using Pzt Thin Film. International Journal of Computational Engineering Science 4(3): 509-512 (2003) |
| 1 | Bangtao Chen | [1] |
| 2 | Jianmin Miao | [1] |
| 3 | Zhihong Wang | [1] |
| 4 | Hong Zhu | [1] |