Xiaoyang Zhu
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2003
1
EE
Xiaoyang Zhu: Monolayer Surface Coatings Solve Stiction and Drift Problems in MEMS.
ICMENS 2003
: 128-130
Copyright ©
Tue Nov 18 16:28:55 2008 by
Michael Ley
(
ley@uni-trier.de
)