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S. Kal

2000 – 2009

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2006
[j4]
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S. Kal, S. Das, D. K. Maurya, K. Biswas, A. Ravi Sankar, S. K. Lahiri: CMOS compatible bulk micromachined silicon piezoresistive accelerometer with low off-axis sensitivity. Microelectronics Journal 37(1): 22-30 (2006)
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K. Biswas, S. Das, D. K. Maurya, S. Kal, S. K. Lahiri: Bulk micromachining of silicon in TMAH-based etchants for aluminum passivation and smooth surface. Microelectronics Journal 37(4): 321-327 (2006)
[j2]
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K. Biswas, S. Kal: Etch characteristics of KOH, TMAH and dual doped TMAH for bulk micromachining of silicon. Microelectronics Journal 37(6): 519-525 (2006)
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K. Biswas, S. Das, S. Kal: Analysis and prevention of convex corner undercutting in bulk micromachined silicon microstructures. Microelectronics Journal 37(8): 765-769 (2006)

Coauthor Index

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