Klaas Jelle Veenstra

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	2003
j1		Yuan Li, Klaas Jelle Veenstra, Jérôme Dubois, Lei Peters-Wu, Agnes van Zomeren, Fred G. Kuper: Reservoir effect and maximum allowed VIA misalignment for AlCu interconnect with tungsten VIA plug. Microelectronics Reliability 43(9-11): 1449-1454 (2003)

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