Thomas W. Weeks

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	1995
j1		Donald G. Chesebro, James W. Adkisson, Lyman R. Clark, Steven N. Eslinger, Margaret A. Faucher, Steven J. Holmes, Raymond P. Mallette, Edward J. Nowak, Edward W. Sengle, Steven H. Voldman, Thomas W. Weeks: Overview of gate linewidth control in the manufacture of CMOS logic chips. IBM Journal of Research and Development 39(1-2): 189-200 (1995)

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